Study of Microstructure and Elemental Micro-Composition of ZnO:Al Thin Films by Scanning and High Resolution Transmission Electron Microscopy and Energy Dispersive X-Ray Spectroscopy
نویسندگان
چکیده
The microstructure and micro-composition of ZnO thin films doped with Al, deposited on Si/SiO2 substrates by sol-gel method were investigated by scanning and high resolution transmission electron microscopy and related energy dispersive X-ray analyses (SEM-EDX, STEM-HRTEM/EDX). Thin films of ZnO were prepared by deposition of 1-10 successive layers with 0.5 at.% and 5 at.% Al concentrations. The evolution of the elemental composition, especially the Al concentration and distribution in the films with various number of layers were determined from energy dispersive X-ray spectra (EDS). The qualitative composition of the structures observed in the films have been evidenced in the elemental EDS maps.
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